Inline type sputtering and plasma polymerization with 5 chambers

Features

The "VRX Series" 5-tank inline sputtering + plasma polymerization system is a mass-production compatible inline sputtering system that fully automates the process from pretreatment to film formation and plasma polymerization.

This system enables continuous processing of RF plasma pretreatment, DC magnetron sputtering, and RF plasma polymerization in a 1-minute cycle time, contributing to stable quality and improved yield through highly uniform film deposition.
By installing a dedicated circulating conveyor, a fully automated sputtering film deposition line was constructed that works in conjunction with the preceding and succeeding processes.
It supports multilayer film deposition processes utilizing inorganic films such as _SiO₂, _TiO₂, _and _Al₂O₃, enabling the formation of functional films.
It can also be applied to the formation of transparent conductive films such as ITO and AZO, supporting the development of diverse functional devices.
Multilayer structure design, including Ag film deposition, enables the formation of highly reflective films and functional coatings.

Main use

Formation of reflective films, transparent conductive films, and surface protective films for automotive lamp reflectors.
Formation of reflective films and antifouling coatings by highly uniform film deposition on cosmetic containers and mirror components.

Expected future applications

Functional thin film formation fields such as ITO film deposition, optical film sputtering, electrode film deposition, insulating film deposition, ceramic film deposition, and piezoelectric film deposition.
For research and development purposes, it can be applied to the development of advanced materials using yttria (Y₂O₃), yttrium-based materials, and various reactive sputtering processes.
Applications include mass production processes for in-vehicle displays and HUD components for next-generation mobility.
Applications include the formation of functional films for optical components used in LiDAR and various sensor devices.
Applications to solar cell electrode formation and transparent conductive film formation processes.
Utilizing large-area film deposition technology, we are applying it to mass production of large components for automobiles, building materials, and home appliances.
By utilizing multilayer film deposition technology, we are developing value-added products such as high-performance optical filters and anti-reflective coatings.
Utilizing transparent conductive film formation technology, we are applying it to functional thin films for organic light-emitting diode (OLED) displays and sensor devices.
Leveraging the process technology cultivated through thin film vacuum coating system, we contribute to the manufacturing of next-generation electronic devices using high-performance PVD equipment.