Inline type sputtering and plasma polymerization with 5 chambers
Features
5槽インラインスパッタ+プラズマ重合システム「VRXシリーズ」は、前処理から成膜、プラズマ重合までを全自動で行う量産対応のインラインスパッタシステムです。
- RFプラズマによる前処理、DCマグネトロンスパッタ、RFプラズマ重合の連続処理を1分タクトで実現し、高均一成膜による品質安定化と歩留まり向上に貢献
- By installing a dedicated circulating conveyor, a fully automated sputtering film deposition line was constructed that works in conjunction with the preceding and succeeding processes.
- SiO2、TiO2、Al2O3などの無機膜を活用した多層成膜プロセスに対応し、機能性膜の形成が可能
- ITOやAZOなどの透明導電膜形成にも応用可能で、多様な機能性デバイス開発を支援
- Ag成膜を含む多層構造設計により、高反射膜や機能性コーティングの形成へ対応可能
Main use
- Formation of reflective films, transparent conductive films, and surface protective films for automotive lamp reflectors.
- Formation of reflective films and antifouling coatings by highly uniform film deposition on cosmetic containers and mirror components.
- Future applications are expected to include functional thin film formation fields such as ITO film deposition, optical film sputtering, electrode film deposition, insulating film deposition, ceramic film deposition, and piezoelectric film deposition.
- For research and development purposes, it is expected to be applied to the development of advanced materials using yttria (Y₂O₃), yttrium-based materials, and various reactive sputtering processes.
Contact Information
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ShinMaywa INSIGHT
2022年03月09日