Inline type sputtering and plasma polymerization with 5 chambers

Features

The VRX350 5-tank inline sputtering + plasma polymerization system is a continuous-process sputtering system ideal for mass production, performing all steps from pretreatment to film formation and plasma polymerization fully automatically.

Process cycle-time as short as 1 minute covers pre-treatment by RF plasma, DC sputtering for reflective film and RF plasma polymerization for protective film coating
By installing a dedicated circulating conveyor, a fully automated sputtering film deposition line was constructed that works in conjunction with the preceding and succeeding processes.

Main use

Formation of reflective and protective films for automobile lamp reflectors and other automobile interior and exterior parts
Formation of reflective films for cosmetic containers, mirror parts, etc.