Inline type sputtering and plasma polymerization with 5 chambers

VRX350

Features

5槽インラインスパッタ+プラズマ重合システム「VRX350」は、前処理から成膜、プラズマ重合までを全自動で行う、量産に最適な連続処理型のスパッタリング装置です。

  • Process cycle-time as short as 1 minute covers pre-treatment by RF plasma, DC sputtering for reflective film and RF plasma polymerization for protective film coating
  • 専用循環コンベアを装着し、前後の工程と連携した全自動のスパッタリング成膜ラインを構築

Main use

  • Formation of reflective and protective films for automobile lamp reflectors and other automobile interior and exterior parts
  • Formation of reflective films for cosmetic containers, mirror parts, etc.

Contact Information

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