The main contents are as follows.
・Reflective films for automobile lamps and mirrors (vapor deposition and sputtering)
・Decorative films for cosmetic containers, interior and exterior parts of automobiles (vapor deposition and sputtering)
・Pretreatment and protective film formation using plasma treatment
・Diamond coating, film removal, sharpening, and nitriding of cutting tools and molds
・Surface treatment of microtome blades, injection needles, suture needles, and razor blades
We have also delivered products for other products. For details, please contact us. inquiry please.

You will need to prepare electricity, cooling water, compressed air, various gases, and exhaust ducts. The capacity depends on the equipment specifications, so please contact us using the form.

Yes, that is possible. Please contact us for details.

We can create samples using demonstration machines for deposition, sputtering, polymerization, diamond coating, ion etching, plasma treatment, heat treatment, vacuum drying, arc melting, and gas purification. We also have various analytical equipment. For details, please contact us using the form.

There are daily maintenance and periodic maintenance. The content and maintenance period vary depending on the equipment used, so please refer to the instruction manual for details. In addition, we recommend replacing sealing parts once a year, although this depends on the usage environment.

Depending on the pump used and operating conditions, replacement is necessary every 1 to 3 months.

Is there a shelf life for the high vacuum grease that is applied and filled into the sealing parts after it has been opened?

It is estimated that cleaning should be done about once every two weeks. (Please change the frequency depending on the work environment and production frequency.) If cleaning is not performed, not only will the exhaust time be extended, but there is also a possibility of poor deposition, so regular cleaning is necessary.

There may be a leak from the piping.
→Please carry out a leak check and repair any leaks.
- The oil in the rotary pump may be dirty.
→Please change the oil.
- Moisture may remain in the rotary pump oil when the cold trap is regenerated.
→Open the gas ballast valve of the rotary pump and run it for about 30 minutes. If the symptoms do not improve, change the oil.

・There may be a leak from the chamber.
→Please carry out a leak check and repair any leaks.
- Dirt may have accumulated on the shield.
→Please clean the shield.
・The Penning vacuum probe may be dirty.
→Please clean or replace the Penning vacuum probe.

There may be a leak from the piping.
→Please carry out a leak check and repair any leaks.
- Moisture from the cold trap regeneration may remain in the oil in the oil diffusion pump or rotary pump.
→Open the gas ballast valve of the rotary pump and operate it for several minutes. If the symptoms do not improve, change the oil.

- The valve cylinder sensor may be broken.
→Please check if the sensor is lit. If it is not lit, please adjust the position of the sensor. If this does not improve the situation, please replace the sensor body.
・The air solenoid valve of the valve cylinder may be broken.
→Please check that there is no problem with opening and closing the solenoid valve. If the problem persists, please replace the solenoid valve.

- The primary utility may have failed or the flow rate may be fluctuating.
→ Check the primary utility and readjust the valve opening and closing amount.
- The flow meter may be clogged due to dirt or the main unit may be broken.
→Please clean the flow meter. If that does not improve the situation, please replace the flow meter.

・Plasma polymerized membrane may have been sucked into the Roots pump and accumulated inside.
→Please clean or overhaul the inside of the Roots pump.

・While switching from rough exhaust to main exhaust, the pressure rose and exceeded the specified pressure.
→ Check for leaks from the valve shaft seal, and if there is a leak, fill it with grease or replace the seal.
Alternatively, please clean the inside of the chamber, including the adhesion protection plate.

- The RF plasma electrode may be dirty, causing poor insulation.
Please clean the electrodes.
・The matching box may be broken.
→Please repair the matching box.
・The RF power supply may be faulty.
Please repair the power supply.

- The RF plasma electrode may be dirty, causing poor insulation.
→Please clean the electrodes and the inside of the chamber.

- The matching box cover may be removed.
→If you check and it is available, please install it.
- The matching box fan may have stopped.
Please repair the fan.
・The power to the matching box itself may be turned off.
→ Check and if it is OFF, please turn it ON.

The electrical equipment may be broken.
→If the problem persists even after turning the power back on, please contact us.

There may be a refrigerant leak.
→Please check the current pressure and various temperatures, as well as the pressure (balance pressure) and temperatures approximately 24 hours after the freezer has been stopped.

There may be a refrigerant leak.
→Please check the current pressure and various temperatures, as well as the pressure (balance pressure) and temperatures approximately 24 hours after the freezer has been stopped.

- There is a possibility that the high pressure switch is deteriorating over time, causing a false detection.
→ After shutting down the refrigerator, contact us.

・The compressor in the refrigerator may be broken.
→ After shutting down the refrigerator, contact us.