Vacuum coating system such as "Polymerization + Sputtering" and "Polymerization + Evaporation" offered by ShinMaywa provides several choices to the customer, for example single batch coater, circular type with stepwise rotation of substrate holder and inline multi-chambers for reflector and protection coating of automobile lamps.

Batch type vapor deposition + plasma polymerization system

Compatible with large scale and large board production.

Batch type sputtering + plasma polymerization system

Batch type suitable for medium scale production. Dual cathode enables high-speed sputtering and high-speed polymerization.

Inline type sputtering and plasma polymerization with 5 chambers

A high-speed sputtering machine that combines a vertical inline continuous tank with a dedicated conveyor line.