Batch type sputtering + plasma polymerization system

VRSP750AD

Features

The "VRSP750AD" is a combined system that offers high film deposition performance as a batch-type sputtering system and the ability to continuously form protective films by plasma polymerization.

  • Utilizes long-life sputtering electrodes to achieve stable sputtering deposition
  • Newly developed plasma process affords high speed deposition, highly durable and waterphilic film in continuous mode
  • Power supply of high power realizes both excellent film quality and high speed process

Specifications

Model VRSP750AD
Substrate size (Including jigs, etc.) φ600×1,500mm 1 axis
Spatter target (examples) Aluminum (Al), Titanium (Ti), Chromium (Cr), etc.
Polymerization monomers (examples) HMDSO (Hexamethyldisiloxane), etc.

Main use

  • Formation of reflective and protective films for automobile lamp reflectors and other automobile interior and exterior parts
  • Formation of reflective films for cosmetic containers, mirror parts, etc.

Contact Information

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