Large Scale Complex Vacuum System

Example 3 : 3 Chambers Inline SPD Ion Coater

Specially designed transportation tool provides wide space in vacuum chamber. SPD (Ion plating) can also be installed in it.



  • Original design of transportation system having less projected parts in the chamber has straight space and provides the stable plasma activation even during SPD process
  • Newly developed materials-supply tool realizes long hours operation without breaking vacuum

Main application

  • Variety of thin film coatings on optical parts (including plastic substrates)