Large Scale Complex Vacuum System

Example 2 : Inline Sputtering and Plasma Polymerization with 5 Chambers

Vertical inline high speed sputtering system combined with carrier's conveyer.



  • Process cycle-time as short as 1 minute covers pre-treatment by RF plasma, DC sputtering for reflecting film and RF plasma polymerization for protective coating
  • Circulation conveyer system makes possible to keep full automation operation

Main application

  • Reflectors and protection film coating for automobile lamps and other reflectors on plastic parts