Large Scale Complex Vacuum System

Example 1 : 6 Chambers Cross Line Twin Coater

Full automation vacuum coating line having 2 evaporation chambers with substrate dome of φ1,600mm.



  • Two independent evaporation chambers carry large substrate domes of φ1,600mm and evaporation process is carried out separately, which gives high throughput and high versatility
  • The system equips drawer pocket for electron beam gun, which enables to run for two continuous weeks without maintenance

Main application

  • Optical parts coating for large amount with variety of substrate size