In-line evaporation/sputtering systems for next-generation solar cells
Deposition solutions for the mass production of next-generation solar cells
The development of next-generation solar cells (such as perovskite solar cells) is shifting from the research and development (R&D) stage to the stage of realizing large-scale and mass production.
Utilizing our large vacuum equipment and vacuum transfer technologies cultivated over many years, we propose custom-made deposition systems compatible with everything from substrates for R&D to meter-class large substrates.
By supporting combined evaporation and sputtering processes and achieving continuous deposition of organic materials, we solve our customers' challenges toward mass production.
Features
Based on basic concepts such as inline type and cluster type, we offer flexible customized designs tailored to your deposition process. We carefully support everything from small sizes for R&D purposes to continuous transfer deposition onto meter-class large substrates and sheets with an eye on mass production.
Low-damage sputtering cathodes can be equipped to minimize deposition damage to organic and perovskite layers, which are vulnerable to heat and plasma.
We maximize the "operating rate," which is important in mass production. The deposition source is designed for 1-2 weeks of continuous operation, minimizing downtime due to maintenance. In addition, by improving the utilization efficiency of sputtering targets, expensive materials are deposited at low cost without waste, contributing to the reduction of running costs.
In the manufacture of next-generation solar cells and organic devices, moisture and oxygen in the atmosphere are major factors in product degradation. This system is equipped with a nitrogen atmosphere loading/unloading mechanism, which suppresses product degradation by preventing atmospheric exposure.
Specifications & Key Technologies
| System Configuration | Batch type, Inline type, Cluster type | |||
|---|---|---|---|---|
| Compatible Substrates | Small substrates for R&D to meter-class large substrates | |||
| Deposition Methods | Evaporation (Resistance heating, K-cell, Multi-point simultaneous evaporation) Sputtering (DC, DC pulse, RF) | |||
| Key Technologies | Low-damage sputtering, High-efficiency target utilization | |||
| Transfer & Environment | Nitrogen atmosphere L/UL, Atmospheric transfer mechanisms | |||
Details and specifications of the above configuration can be changed according to customer requests.
Contact Information
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