Proudly achieved low NRRO (non-repeatable run-out), top-rank in the industry

Air spindle [SPM30 type]


  • Reduces unbalance during high-speed rotation (20,000min-1) and achieves low vibration.
    Unbalance amount 0.05gmm or less
  • Maintains NRRO 2nm or less (according to our measurement standards) at high speeds (20,000min-1) to low speeds
  • Built-in high-speed, large-torque built-in motor (developed in-house) achieves smooth startup up to rotational speeds of 20,000 min-1
    In addition, stable rotation with rotational unevenness accuracy of 0.001% or less is achieved.
  • In combination with a non-switching driver, it is effective in disk inspection equipment that dislikes electromagnetic noise.
  • The turntable has a class 10 cleanliness performance that can be used in clean rooms.
  • Depending on environmental of use, high-temperature specifications or low-temperature specifications can be provided individually.


Air spindle [SPM30 type] Main dimensions
(Unit: mm)


Model SPM30
Air supply pressure used 0.5MPa (G)
Maximum rotation speed 20,000r/min
Rotation speed fluctuation *1 0.001% or less (encoder Z phase jitter)
Non-repetitive rotational runout accuracy
Radial 0.002μm or less
Axial 0.002μm or less
Repeated rotational runout accuracy
Radial 1μm or less
Axial 1μm or less
Rigidity Radial 12N/μm or more
Axial 45N/μm or more
Load capacity Radial 40N or more
Axial 110N or more
Consumption air flow rate 15Nl/min or less
Motor capacity 60W (at 20,000r/min)
Cleanliness Class 10 (0.1μm)
Unbalance amount 0.05gmm or less
Weight 2.7kg
  1. *1 When our Non-Switching Driver NS20-A is applied.

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