SPM30

Proudly achieved low NRRO (non-repeatable run-out), top-rank in the industry

Features

Reduces unbalance during high-speed rotation (20,000min-1) and achieves low vibration.
Unbalance amount 0.05gmm or less
Maintains NRRO 2nm or less (according to our measurement standards) at high speeds (20,000min-1) to low speeds
Built-in high-speed, large-torque built-in motor (developed in-house) achieves smooth startup up to rotational speeds of 20,000 min-1
In addition, stable rotation with rotational unevenness accuracy of 0.001% or less is achieved.
In combination with a non-switching driver, it is effective in disk inspection equipment that dislikes electromagnetic noise.
The turntable has a class 10 cleanliness performance that can be used in clean rooms.
Depending on environmental of use, high-temperature specifications or low-temperature specifications can be provided individually.

Model		SPM30
Air supply pressure used		0.5MPa (G)
Maximum rotation speed		20,000r/min
Rotation speed fluctuation ^*1		0.001% or less (encoder Z phase jitter)
Non-repetitive rotational runout accuracy (NRRO)	Radial	0.002μm or less
Non-repetitive rotational runout accuracy (NRRO)	Axial	0.002μm or less
Repeated rotational runout accuracy (TIR)	Radial	1μm or less
Repeated rotational runout accuracy (TIR)	Axial	1μm or less
Rigidity	Radial	12N/μm or more
Rigidity	Axial	45N/μm or more
Load capacity	Radial	40N or more
Load capacity	Axial	110N or more
Consumption air flow rate		15Nl/min or less
Motor capacity		60W (at 20,000r/min)
Cleanliness		Class 10 (0.1μm)
Unbalance amount		0.05gmm or less
Weight		2.7kg