Air spindle for the disk precision rotation of the disk inspection device

Air spindle [SPM27H type]


  • Compact, lightweight, and high speed.
  • Class 10 (0.1μm) cleanness.
  • Vacuum contact structure at the center of bearing allows for installing workpiece such as disk.


Air spindle [SPM27H type] Main dimensions
SPM27H type (unit: mm)


Model SPM27H
Air supply pressure used 0.4MPa (G)
Maximum rotation speed 20,000r/min
Rotation speed fluctuation *1 0.001% or less
(Encoder Z phase jitter)
Non-repetitive rotational runout accuracy
Radial 0.01μm or less
Axial 0.01μm or less
Repeated rotational runout accuracy
Radial 2μm or less
Axial 1μm or less
Rigidity Radial 7N/μm or more
Axial 30N/μm or more
Load capacity Radial 26N or more
Axial 90N or more
Consumption air flow rate 10Nl/min or less
Motor capacity 65W
(at 20,000r/min)
Cleanliness Class 10 (0.1μm)
Unbalance amount 0.05gmm or less
Weight 2.0kg
  1. *1 When our Non-Switching Driver NS20-A is applied.

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