SPM27H
Air spindle for the disk precision rotation of the disk inspection device
Features
- Compact, lightweight, and high speed.
- Class 10 (0.1μm) cleanness.
- Vacuum contact structure at the center of bearing allows for installing workpiece such as disk.
Dimensions
Specifications
Model | SPM27H | |
---|---|---|
Air supply pressure used | 0.4MPa (G) | |
Maximum rotation speed | 20,000r/min | |
Rotation speed fluctuation *1 | 0.001% or less (Encoder Z phase jitter) |
|
Non-repetitive rotational runout accuracy (NRRO) |
Radial | 0.01μm or less |
Axial | 0.01μm or less | |
Repeated rotational runout accuracy (TIR) |
Radial | 2μm or less |
Axial | 1μm or less | |
Rigidity | Radial | 7N/μm or more |
Axial | 30N/μm or more | |
Load capacity | Radial | 26N or more |
Axial | 90N or more | |
Consumption air flow rate | 10Nl/min or less | |
Motor capacity | 65W (at 20,000r/min) |
|
Cleanliness | Class 10 (0.1μm) | |
Unbalance amount | 0.05gmm or less | |
Weight | 2.0kg |
- *1 When our Non-Switching Driver NS20-A is applied.
Contact Information
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