Optional Equipment for Vacuum Coating System

Drawer System for EB Gun Unit

The maintenance of the EB gun deposition source, the shutter surroundings, and the filament is enabled with the vacuum of the deposition tank kept.

Drawer System for EB Gun Unit

Advantages

  • The drawer box makes possible to clean up the EB gun unit, the shutter and surroundings without breaking the vacuum chambers, which provides high quality film and continuous operation
  • Filament exchange of EB gun and dust cleaning are also done without system down
  • Several interlock switches for operation are synchronized to the total control circuitry in the system, which secures the safety measure
  • The drawer box has demonstrated stable operation for more than 15 years, means it is highly reliable
  • Based upon customer's request, ShinMaywa proposes the optimized system for process condition, variation of evaporation materials, cleaning cycle and others (for example, a customer specifies number of EB hearse, direction to draw, position and layout)