Batch Type Vacuum Evaporation System for Optical Multilayer Coating

Batch Type Vacuum Evaporation System for Optical Multilayer Coating

Main specification

Vacuum chamber Material: SUS304
Substrate jig (dome) φ950mm, φ1,100mm
Pumping system oil diffusion pump or cryo pump Ultra low temperature refrigerator "NeoCold" (option)
Substrate heater Sheath heater
Thickness monitor Optical thin film monitor and Quartz crystal monitor
Monitor glass exchanger Installed 60 pieces monitor glass (up to 100 pieces possible)
Evaporation source (2 units) EB gun or Heat resistance
Vacuum gauge(Each tank) Penning gauge + Pirani and Ion gauge (option)
Gas inlet Automatic pressure controller (APC)
Automatic flow controller (MFC)

Main performance

Ultimate vacuum 1.3 × 10-4Pa
Pumping speed 1.3 × 10-3Pa within 30minutes
Substrate temperature Max. 350 °C, Standard use at 300 °C, Distribution +/-10 °C

Evacuation and deposition operation

  • Full automatic evaporation system by man-machine interface at Windows NT version