Components and Optional Equipment
Transportation Robot in Vacuum
Multi-chambers system proposed by ShinMaywa adopts many robots in the system for handling the heavy and fragile substrates, and automatic transportation.
Mechatronics technology having been accumulated through long experiences in making welding robot, laser cutting robot and AGV for semiconductor fabrication can afford stable mechanism, matured software, fine servo-control and improved anti-noise design.
Hence the system has high performance and reliability. Design and fabrication of stand lone robot is also acceptable. Please contact ShinMaywa.
- The robotic system is the best fitting to transportation and automation for handling the heavy and fragile substrate
- Carrying capacity
- 50 - 300Kg
- Accurate positioning at X axis, θ axis and Z axis
- Limit of vacuum degree
- Temperature limit
- Transportation at low noise
- < 0.5G (G-value measured by 50Hz low-path filter)