Optional Equipment for Vacuum Coating System
Monitor Glass Exchanger
The monitor glass of the optical film thickness monitor can be exchanged without giving the substrate the temperature influence.
- 60pcs of monitor glass can be installed, and the used one is stored in a cartridge
- 100pcs of glass are installed by option
- A separate heater is equipped to heat up the monitor glass for keeping the same deposition condition as the real substrate
- Detaching mechanism is devised to avoid monitor glass adhere each other
- No negative influence is expected to temperature uniformity caused by thermal load of monitor glass heater