Optional Equipment for Vacuum Coating System

Monitor Glass Exchanger

The monitor glass of the optical film thickness monitor can be exchanged without giving the substrate the temperature influence.

Monitor Glass Exchanger

Advantages

  • 60pcs of monitor glass can be installed, and the used one is stored in a cartridge
  • 100pcs of glass are installed by option
  • A separate heater is equipped to heat up the monitor glass for keeping the same deposition condition as the real substrate
  • Detaching mechanism is devised to avoid monitor glass adhere each other
  • No negative influence is expected to temperature uniformity caused by thermal load of monitor glass heater