Optional Equipment for Vacuum Coating System

Substrate Rotational Tool

Substrate Rotational Tool

Advantages

  • Large carrying capacity, highly durable and easy maintenance
  • Rotational drive is located at atmosphere, which hardly generates particles in vacuum chamber
  • Thanks to the center driving mechanism, the dome diameter is large enough to keep smooth rotation comparing with the ring-gear driving mechanism located at periphery of the dome
  • Chamber cleaning is easy because the chamber has few projected parts in it

Various dome mechanisms

Revolution dome

Revolution dome

Reversing mechanism

Reversing mechanism

Revolution mechanism

Revolution mechanism