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Installation References
Process Flow Till Installation
Complex Coating System
Fusion of Technology
Briefing of Multi-chambers System
Main Components
Block Diagram for Control
Typical Vacuum System and Components
Ozone Layer and Regulation of Freon Gas Usage
Ozone Layer and Freon Gas
Regulation of Freon Gas Usage
Environmental Preservation
Japan
Overseas
Vacuum Coating System for Optical Thin Film Market
SPD Ion Coater
IAD System for Non-shift Characteristic
3 Chambers Inline SPD Ion Coater
Characteristic Equipments
Vacuum Coating System for Decorative Market
Batch Coater of Evaporation and Plasma Polymerization
Batch Coater of Sputtering and Plasma Polymerization
Inline Sputtering and Plasma Polymerization with 5 Chambers
Large Scale Complex Vacuum System
Typical Proposal for Multi-chambers System
Example 1 : 6 Chambers Cross Line Twin Coater
Example 2 : Inline Sputtering and Plasma Polymerization with 5 Chambers
Example 3 : 3 Chambers Inline SPD Ion Coater
Components and Optional Equipments
Ultra Low Temperature Refrigerator for Evacuation "NeoCold" RCT Series(RCT 752 / 760)
Large Scale Gate Valve
Transportation Robot in Vacuum
Optional Equipments for Vacuum Coating System
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