Optional Equipments for Vacuum Coating System

Components and Optional Equipments

ShinMaywa prepares plenty of optional equipment to fabricate vacuum coating system that produces high quality coatings for customers.

Advantages

Large carrying capacity, highly durable and easy maintenance
Rotational drive is located at atmosphere, which hardly generates particles in vacuum chamber
Thanks to the center drive mechanism, dome diameter is large enough to keep smooth rotation comparing with ring-gear driving mechanism
Chamber cleaning is easy because the chamber has few projected parts in it
Smooth rotation at 3-30rpm gives fine uniformity

Advantages

The lifter makes easy to set and de-touch the jig for substrate rotation tool and dome for substrate heater in the chamber

Advantages
Wavelength covering for measurement	UV (ultraviolet) - NIR (near infrared)
Other advantages	Further precise control is possible when the monitor is combined with automatic evaporation controller "SEVEN" developed by ShinMaywa As fiber optics cable is used to connect detector and controller, the monitor has high fidelity to noise elimination Measurement of optical intensity with high accuracy is achieved from visible range to near infrared and from visible range to ultra violet

Advantages

The drawer box makes possible to clean up the EB gun unit, the shutter and surroundings without breaking the vacuum chambers, which provides high quality film and continuous operation
Filament exchange of EB gun and dust cleaning are also done without system down
Several interlock switches for operation are synchronized to the total control circuitry in the system, which secures the safety measure
The drawer box has demonstrated stable operation for more than 15 years, which means it is highly reliable
Based upon customers request, ShinMaywa proposes the optimized system for process condition, variation of evaporation materials, cleaning cycle and others (for example, customer specifies number of EB hearse, direction to draw, position and layout)