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Large Scale Complex Vacuum System
Example 3 : 3 Chambers Inline SPD Ion Coater
Specially designed transportation tool provides wide space in vacuum chamber. SPD (Ion plating) can also be installed in it.
Advantages
- Original design of transportation system having less projected parts in the chamber has straight space and provides the stable plasma activation even during SPD process
- Newly developed materials-supply tool realizes long hours operation without breaking vacuum
Main application
- Variety of thin film coatings on optical parts (including plastic substrates)