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Vacuum Coating System for Optical Thin Film Market
Characteristic Equipments
Optical Thin Film Monitor FMP2000 Series |
Substrate Rotational tool |
Monitor Glass Exchanger |
Automatic Evaporation System " SEVEN "
Optical Thin Film Monitor FMP2000 Series
| Advantages | |
|---|---|
| Wavelength covered | UV(ultraviolet)-NIR(near infra red) |
| Other advantages |
|
Substrate Rotational Tool
Advantages
- The equipment is large carrying weight, durable and easy maintenance
- Driving part is located in atmosphere, which minimizes particle generation in the chamber
- Thanks to the center driving mechanism,dome diameter is large enough to keep smooth rotation comparing with ring-gear driving mechanism
- Chamber cleaning is easy because the chamber has few projected parts in it
Monitor Glass Exchanger
Advantages
- 60pcs of monitor glass can be installed, and the used one is stored in a cartridge
- 100pcs of glass are installed by option
- A separate heater is equipped to heat up the monitor glass for keeping the same deposition condition as the real substrate
- Detaching mechanism is devised to avoid monitor glass adhere each other
- No negative influence is expected to temperature uniformity caused by thermal load of monitor glass heater
Automatic Evaporation Control System " SEVEN "
Advantages
- It is possible to edit evaporation conditions like operation of general calculation software
- Variety of evaporation control is available
- Display looks plain at image and graphics
- Many functions for data file and graphic display are available