Complex Coating System

Fusion of Technology

Chronicle of integration steps in vacuum technology and robotics technology (Technology license and R&D activity)

Year Vacuum Technology Robotics Technology
1960s Based upon technology accumulated in airplane fabrication, production of Aluminum and stainless can were done Having been grated the license of oil pressure robot by Versatran of AMF (first occasion in Japan)
1970s Textile: Vacuum heat-treatment equipment Pharmaceutical: Vacuum heat Sterilizer Developed welding robot
1980s Ultra large vacuum drier plant
Ultra high vacuum system for Nuclear Fusion at Osaka University
Large welding robot for construction machine
Etching system production for OEM 3D CO2 laser cutting robot
System with Roller Transportation (Twin Coater) Assembly robot used in clean rooms
1990s Inline sputtering system for HD media 6 Axes Clean Robot for AGV
Transportation robot of glass substrate for LCD
2000s Evaporation system for NBPF at 100GHz Variety of vacuum valves Development of transportation system for large substrate in vacuum
Integration

Multi-chambers system

Large Multi-chambers Vacuum System with Roller Transportation (Twin Coater)

Large Multi-chambers Vacuum System with Roller Transportation (Twin Coater)

The first and the last chamber (loading and unloading chamber) are installed, where heating and cooling process is carried out, respectively. The chamber is functional from atmosphere to vacuum and from vacuum to atmosphere. Having been kept in vacuum, all other chambers for evaporation process is stable, and film quality deposited is in good condition, which makes high production yield and high productivity. The system supplied by ShinMaywa has many installation references in association with vacuum transportation equipment, vacuum gate valve, with drawer system for EB (Electron Beam) gun unit and system control.

As the Cross Twin Coater has two evaporation chambers, to which independent approach from different loading chamber is possible, has wide versatility in use in addition to high productivity. Inline system, for further specific application, can also be fabricated, which eliminates complex transportation system and additional distribution chamber, hence productivity and low cost system is achieved. While, in case the evaporation process takes time, it is realistic approach to set 2 evaporation chambers that separates evaporation time and shorten the process cycle time. Customer has options in accordance with each application.

  • It is possible to build the best fitting system, because the process is executed at each chamber separately
  • Important maintenance job is done without breaking the vacuum such as supply of new evaporation materials, cleaning of evaporation unit, exchange of shutters and supply/exchange of monitor glass
  • Since the design minimizes contamination in the vacuum chamber, the chamber maintenance lasts around two weeks even 24 hours continuous operation taking advantage of drawer system for EB gun unit

6 Axes Clean Robot for AGV

6 Axes Clean Robot for AGV

Multi-chambers system proposed by ShinMaywa adopts many robots in the system for handling the heavy and fragile substrates and for automatic transportation. Mechatronics technology having been accumulated through long experience in making welding robot, laser cutting robot and AGV for semiconductor fabrication can afford stable mechanism, matured software, fine servo-control and improved anti-noise design. Hence the system has high performance and reliability.