Components and Optional Equipment

Optional Equipment for Vacuum Coating System

ShinMaywa prepares plenty of optional equipment to fabricate vacuum coating system that produces high quality coatings for customers.

Substrate Rotational Tool

Substrate Rotational Tool

Advantages

  • Large carrying capacity, highly durable and easy maintenance
  • Rotational drive is located at atmosphere, which hardly generates particles in vacuum chamber
  • Thanks to the center drive mechanism, dome diameter is large enough to keep smooth rotation comparing with ring-gear driving mechanism
  • Chamber cleaning is easy because the chamber has few projected parts in it
  • Smooth rotation at 3-30rpm gives fine uniformity

Lifter for Desorbing the Substrate Rotational Jig

Lifter for Desorbing the Substrate Rotational Jig

Advantages

  • The lifter makes easy to set and de-touch the jig for substrate rotation tool and dome for substrate heater in the chamber

Optical Thin Film Monitor FMP2000 Series

Optical Thin Film Monitor FMP2000 Series

Advantages

Wavelength covering for measurement

UV (ultraviolet) - NIR (near infrared)

Other advantages

  • Further precise control is possible when the monitor is combined with automatic evaporation controller "SEVEN" developed by ShinMaywa
  • As fiber optics cable is used to connect detector and controller, the monitor has high fidelity to noise elimination
  • Measurement of optical intensity with high accuracy is achieved from visible range to near infrared and from visible range to ultra violet

Drawer System for EB Gun Unit

Drawer System for EB Gun Unit

Advantages

  • The drawer box makes possible to clean up the EB gun unit, the shutter and surroundings without breaking the vacuum chambers, which provides high quality film and continuous operation
  • Filament exchange of EB gun and dust cleaning are also done without system down
  • Several interlock switches for operation are synchronized to the total control circuitry in the system, which secures the safety measure
  • The drawer box has demonstrated stable operation for more than 15 years, which means it is highly reliable
  • Based upon customers request, ShinMaywa proposes the optimized system for process condition, variation of evaporation materials, cleaning cycle and others (for example, customer specifies number of EB hearse, direction to draw, position and layout)

Monitor Glass Exchanger

Monitor Glass Exchanger

Advantages

  • 60pcs of monitor glass can be installed, and the used one is stored in a cartridge
  • 100pcs of glass are installed by option
  • A separate heater is equipped to heat up the monitor glass for keeping the same deposition condition as the real substrate
  • Detaching mechanism is devised to avoid monitor glass adhere each other
  • No negative influence is expected to temperature uniformity caused by thermal load of monitor glass heater

Full Automatic Evaporation Control System "SEVEN"

Full Automatic Evaporation Control System "SEVEN"

Advantages

  • It is possible to edit evaporation conditions like operation of general calculation software
  • Variety of evaporation control is available
  • Display looks plain at image and graphics
  • Many functions for data file and graphic display are available