Large Scale Complex Vacuum System
Example 2 : Inline Sputtering and Plasma Polymerization with 5 Chambers
Vertical inline high speed sputtering system combined with carrier's conveyer.
- Process cycle-time as short as 1 minute covers pre-treatment by RF plasma, DC sputtering for reflecting film and RF plasma polymerization for protective coating
- Circulation conveyer system makes possible to keep full automation operation
- Reflectors and protection film coating for automobile lamps and other reflectors on plastic parts