Large Scale Complex Vacuum System
Example 1 : 6 Chambers Cross Line Twin Coater
Full automation vacuum coating line having 2 evaporation chambers with substrate dome of φ1,600mm.
- Two independent evaporation chambers carry large substrate domes of φ1,600mm and evaporation process is carried out separately, which gives high throughput and high versatility
- The system equips drawer pocket for electron beam gun, which enables to run for two continuous weeks without maintenance
- Optical parts coating for large amount with variety of substrate size