Transportation Robot in Vacuum

Transportation Robot in Vacuum

Main specification

Carrying capacity
50~300Kg
Axis
Accurate positioning at X-axis, θ-axis and Z-axis
Limit of vacuum degree
10-4Pa
Temperature limit
300°C
Transportation at low noise
< 0.5G (G-value measured by 50Hz low-path filter)

Large Scale Gate Valve

Large Scale Gate Valve

Main specification

Valve openings
W 500mm × H 300mm
~W 2,000mm × H 800mm
Other features
  • Reliable and long life
  • Durable to vacuum and atmosphere pressure
  • Uniform pressure applied by multiple-links
  • Easy maintenance
  • Temperature resistance by heat separation shield
  • Dust free design

Optical Thin Film Monitor FMP2000 Series

Optical Thin Film Monitor FMP2000 Series

Advantages

  • Measurement of optical intensity with high accuracy is achieved from visible range to near infrared (FMP2000VIS/NIR) and from visible range to ultra violet (FMP2000 UV/VIS) in wavelength
  • As fiber optics cable is used to connect detector and controller, the monitor has high fidelity to noise elimination
  • Further precise control is possible when the monitor is combined with automatic evaporation controller "SEVEN" developed by ShinMaywa

Drawer System for EB Gun Unit

Drawer System for EB Gun Unit

Advantages

  • The drawer box makes possible to clean up the EB gun unit, the shutter and surroundings without breaking the vacuum chambers, which provides high quality film and continuous operation
  • Filament exchange of EB gun and dust cleaning are also done without system down
  • Several interlock switches for operation are synchronized to the total control circuitry in the system, which secures safety measure
  • The drawer box has demonstrated stable operation for more than 15 years, which means it is highly reliable
  • Based upon customer's request, ShinMaywa proposes the optimized system for process condition, variation of evaporation materials, cleaning cycle and others (For example, a customer specifies number of EB hearse, direction to draw, position and layout)

Substrate Rotational Tool

Substrate Rotational Tool

Advantages

  • Large carrying capacity, highly durable and easy maintenance
  • Rotational drive motor is located at atmosphere, which hardly generates particles in vacuum chamber
  • Thanks to the center drive mechanism, the dome diameter is large enough to keep smooth rotation comparing with ring-gear driving mechanism located at peripheral of the dome
  • Chamber cleaning is easy because the chamber has few projected parts in it
  • Smooth rotation at 3-30rpm gives fine uniformity