Optical Thin Film Monitor FMP2000 Series

Optical Thin Film Monitor FMP2000 Series

Advantages

Wavelength covered

UV(ultraviolet)-NIR(near infra red)

Other advantages

  • Spectrum by grating (diffraction lattice)
  • Precise process control is possible in association with automatic evaporation system "SEVEN" developed by ShinMaywa
  • Signal transmission is done by fiber optics cable, which makes noise free
  • Optical components are designed for easy maintenance
  • Optical intensity at any wavelength from ultraviolet to visible range is measured with high accuracy

Substrate Rotational Tool

Substrate Rotational Tool

Advantages

  • The equipment is large carrying weight, durable and easy maintenance
  • Driving part is located in atmosphere, which minimizes particle generation in the chamber
  • Thanks to the center driving mechanism,dome diameter is large enough to keep smooth rotation comparing with ring-gear driving mechanism
  • Chamber cleaning is easy because the chamber has few projected parts in it

Monitor Glass Exchanger

Monitor Glass Exchanger

Advantages

  • 60pcs of monitor glass can be installed, and the used one is stored in a cartridge
  • 100pcs of glass are installed by option
  • A separate heater is equipped to heat up the monitor glass for keeping the same deposition condition as the real substrate
  • Detaching mechanism is devised to avoid monitor glass adhere each other
  • No negative influence is expected to temperature uniformity caused by thermal load of monitor glass heater

Automatic Evaporation Control System "SEVEN"

Automatic Evaporation Control System "SEVEN"

Advantages

  • It is possible to edit evaporation conditions like operation of general calculation software
  • Variety of evaporation control is available
  • Display looks plain at image and graphics
  • Many functions for data file and graphic display are available