Vacuum Coating System for Optical Thin Film Market

IAD System for Non-shift Characteristic

VCD1350AD

VCD1350AD

System overview

VCD1350 is the vacuum coating system for depositing shift-free films such as NBPF (narrow band path filter), edge filter, IR cut filter, AR film, etc., for which IAD (Ion Assisted Deposition) tool is integrated for covering large deposition area

Advantages

  • Uniform distribution of ion current covering φ 1,200mm dome and high current density are obtainable
  • Full automatic evaporation process by system "SEVEN"
  • The system installs automatic monitor glass exchanger of 60pcs for precise optical monitor
  • High speed substrate rotation on axis

Brief specification of the system

Vacuum chamber
Material:SUS304 Diameter φ 1,350mm
equivalent × H1,600mm (inner)
Substrate dome
φ1,200, driving shaft on axis
Rotational speed of the dome
6-30rpm (option:10-60rpm)
Optical thickness monitor
FMP2000VIS(spectrum specification)
Wavelength covers 350nm-1,100nm
Exchange tool for monitor glass; 60pcs auto-exchanger
Quartz thickness monitor
XTC-2 (Inficon), 6 points rotary sensor
Evaporation source
2 EB guns
Ion source
16cm High power RF Ion source
Grid size
16cm Molybdenum 3pieces of grid
Beam voltage
250-1,250V
Maximum beam current
1,000m Amp.
Accelerator voltage
100-1,000V
Maximum RF power output
1,000W
Density distribution of Ion currency
< +/-10.0% (in φ 1,200mm dome)
Density of Ion currency
60 μ A/cm2 (in φ 1,200mm dome)

Optical characteristics

Optical characteristics