DC Magnetron System
- System Sales
What is DC Magnetron System ?
This system utilizes a magnetron sputtering method by using direct current power supply.
It is able to coat a metal film, metal nitride film and metal oxide film with metal target and inlet gas.
This system has ion source as a standard equipment, it improves coating adhesion by ion irradiation.
Decorative coatings are possible with colors from red to purple like rainbow in interference of the light depending on coating thickness.
Improvement of wear resistance and corrosion resistance.
|Gas||Ar, O2, N2|
|Temp.||40 - 100℃|
Films of metal, metal nitride and metal oxide are possible with the target (Ti, Ta, W, Ag) and processing gas variation.
Now in preparation