Product Information

DC Magnetron System

  • System Sales

Technical Information

What is DC Magnetron System ?

This system utilizes a magnetron sputtering method by using direct current power supply.
It is able to coat a metal film, metal nitride film and metal oxide film with metal target and inlet gas.
This system has ion source as a standard equipment, it improves coating adhesion by ion irradiation.

DC Magnetron System

DC Magnetron System

Effectiveness

Decorative coatings are possible with colors from red to purple like rainbow in interference of the light depending on coating thickness.
Improvement of wear resistance and corrosion resistance.

System specifications

System specifications
Size W 2,800mm
D 1,400mm
H 2,150mm
Weight -
Gas Ar, O2, N2
Temp. 40 - 100℃

Application Examples

Films of metal, metal nitride and metal oxide are possible with the target (Ti, Ta, W, Ag) and processing gas variation.

Application Example of DC Magnetron System
Application Example of DC Magnetron System
Application Example of DC Magnetron System
Application Example of DC Magnetron System

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Product Inquiries

ShinMaywa Industries, Ltd.
Particle Beam Department, Industrial Machinery Systems Division1-1 Shinmeiwa-cho, Takarazuka, Hyogo 665-0052, Japan
Phone: +81-798-54-1880Fax: +81-798-54-1805