Air Spindle

Air spindle for the disk precision rotation of the disk inspection device

Features

• Compact, lightweight, and high speed.
• Class 10 (0.1µm) cleanness.
• Vacuum contact structure at the center of bearing allows for installing workpiece such as disk.

Specification

Type		SPM27	SPM27H
Air supply pressure		0.4MPa (G)	0.4MPa (G)
Maximum rotation speed		15,000r/min	20,000r/min
Rotation speed change *		0.001% and below (Encoder Z phase jitter)	0.001% and below (Encoder Z phase jitter)
Non-repeatable run-out (NRRO)accuracy	Radial	0.03µm and below	0.01µm and below
	Axial	0.03µm and below	0.01µm and below
Repeatable run-out (TIR)accuracy	Radial	2µm and below	2µm and below
	Axial	1µm and below	1µm and below
Rigidity	Radial	5.8N/µm and above	7N/µm and above
	Axial	21.5N/µm and above	30N/µm and above
Load capacity	Radial	23.5N and above	26N and above
	Axial	65.6N and above	90N and above
Air mass consumption		10Nl/min and below	10Nl/min and below
Motor capacity		55W (at 15,000r/min)	65W (at 20,000r/min)
Cleanness		Class 10 (0.1µm)	Class 10 (0.1µm)
Unbalance force		0.05gmm and below	0.05gmm and below
Mass		1.9Kg	2.0Kg

* When our Non-Switching Driver NS20 is applied.

Specifications and dimensions are subject to change without notice.