Air Spindle

Air spindle for the disk precision rotation of the disk inspection device

Features

• Compact, lightweight, and high speed.
• Class 10 (0.1µm) cleanness.
• Vacuum contact structure at the center of bearing allows for installing workpiece such as disk.

Specification

Type		SPM20H
Air supply pressure		0.4MPa (G)
Maximum rotation speed		20,000r/min
Rotation speed change *1		0.001% and below (Encoder Z phase jitter)
Non-repeatable run-out (NRRO)accuracy	Radial	0.01µm and below
	Axial	0.01µm and below
Repeatable run-out (TIR)accuracy	Radial	2µm and below
	Axial	1µm and below
Rigidity	Radial	2N/µm and above
	Axial	23N/µm and above
Load capacity	Radial	9N and above
	Axial	75N and above
Accelerating time		2 sec. and below 0 - 20,000r/min *2
Decelerating time		2 sec. and below 20,000 - 0r/min *2
Air mass consumption		10Nl/min and below
Motor capacity		80W (at 20,000r/min)
Cleanness		Class 10 (0.1µm)
Unbalance force		0.05gmm and below
Mass		1.6Kg

*¹ When our Non-Switching Driver NS20 is applied.
*² Load 1.1; workpiece is disk.

Specifications and dimensions are subject to change without notice.